Thin-film transistor and method of fabricating the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S758000, C257SE29178, C257SE31113

Reexamination Certificate

active

07321152

ABSTRACT:
Provided are a thin-film transistor formed by connecting polysilicon layers having different conductivity types with each other which prevents occurrence of inconvenience resulting from diffusion of impurities and a method of fabricating the same.A drain (6), a channel (7) and a source (8) are integrally formed on a surface of a second oxide film (4) by polysilicon. The drain (6) is formed to be connected with a pad layer (3) (second polycrystalline semiconductor layer) through a contact hole (5) which is formed to reach an upper surface of the pad layer (3). The pad layer (3) positioned on a bottom portion of the contact hole (5) (opening) is provided with a boron implantation region BR.

REFERENCES:
patent: 4897704 (1990-01-01), Sakurai
patent: 5245210 (1993-09-01), Nishigoori
patent: 5381040 (1995-01-01), Sun et al.
patent: 5382807 (1995-01-01), Tsutsumi et al.
patent: 5438537 (1995-08-01), Sasaki
patent: 5453952 (1995-09-01), Okudaira et al.
patent: 5475240 (1995-12-01), Sakamoto
patent: 5492851 (1996-02-01), Ryou
patent: 5526304 (1996-06-01), Kawamura
patent: 5536951 (1996-07-01), Muragishi
patent: 5541455 (1996-07-01), Hodges
patent: 5548153 (1996-08-01), Muragishi
patent: 5581093 (1996-12-01), Sakamoto
patent: 5717251 (1998-02-01), Hayashi et al.
patent: 5818090 (1998-10-01), Kimura
patent: 5831285 (1998-11-01), Takeuchi et al.
patent: 5831897 (1998-11-01), Hodges
patent: 5841199 (1998-11-01), Yang
patent: 5844256 (1998-12-01), Higashino
patent: 5874770 (1999-02-01), Saia et al.
patent: 2005/0167673 (2005-08-01), Maegawa et al.
patent: 2-270335 (1990-11-01), None
patent: 4-370956 (1992-12-01), None
patent: 5-251667 (1993-09-01), None
patent: 5-283650 (1993-10-01), None
patent: 5-315571 (1993-11-01), None
patent: 7-176743 (1995-07-01), None
T. F. McNelly, et al. “High Performance 0.25 μm SRAM Technology with Tungsten Interpoly Plug,” IEDM '95 Technical Digest, 1995, pp. 927-930.

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