Charged particle beam apparatus and automatic astigmatism...

Details Charged particle beam apparatus and automatic astigmatism... Charged particle beam apparatus and automatic astigmatism...

2006-04-13

2008-03-25

Vanore, David (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C250S306000, C250S307000

Reexamination Certificate

active

07348558

ABSTRACT:
According to the invention, techniques for automatically adjusting for astigmatism in a charged particle beam apparatus. Embodiments according to the present invention can provide a charged particle beam apparatus and an automatic astigmatism adjustment methods capable of automatically correcting astigmatism and a focal point in a relatively short period of time by finding a plurality of astigmatism correction quantities and a focal point correction quantity in a single operation from a relatively small number of 2 dimensional images. Specific embodiments can perform such automatic focusing while minimizing damages inflicted on subject samples. Embodiments include, among others, a charged particle optical system for carrying out an inspection, a measurement and a fabrication with a relatively high degree of accuracy by using a charged particle beam.

REFERENCES:
patent: 6538248 (2003-03-01), Kametani et al.
patent: 6825480 (2004-11-01), Watanabe et al.
patent: 7030394 (2006-04-01), Watanabe et al.

Affiliated with

Also associated with

Rating

Charged particle beam apparatus and automatic astigmatism... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Charged particle beam apparatus and automatic astigmatism..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Charged particle beam apparatus and automatic astigmatism... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3962509