Exposure apparatus wherein a wafer contact portion of a movable

Details Exposure apparatus wherein a wafer contact portion of a movable Exposure apparatus wherein a wafer contact portion of a movable

1995-09-26

1998-08-11

Moses, R. L.

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

355 53, G03B 2742, G03B 2758

Patent

active

057934746

ABSTRACT:
A plurality of ridge-shaped contact portions are formed on a wafer holder to extend in a direction parallel to the scanning direction, and chucking grooves for chucking the lower surface of a wafer are formed on these contact portions. The lower surface of the wafer is pushed up by movable members which are vertically movably arranged in the Z direction between the contact portions, thereby correcting any curve of the wafer in the transverse direction. Alternatively, the curve of the wafer is corrected by adjusting the pressure in a space defined by adjacent contact portions and the wafer.

REFERENCES:
patent: 4737824 (1988-04-01), Sakai et al.
patent: 5177528 (1993-01-01), Koromegawa et al.
patent: 5563683 (1996-10-01), Kamiya
patent: 5572288 (1996-11-01), Mizutani

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