Method for forming contact plug of semiconductor device

Details Method for forming contact plug of semiconductor device Method for forming contact plug of semiconductor device

2008-01-01

2008-01-01

Le, Thao P. (Department: 2818)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S629000

Reexamination Certificate

active

11026226

ABSTRACT:
Disclosed is a method for fabricating a semiconductor device; and more particularly, to a method for fabricating a plurality of contact plugs capable of preventing a self-aligned contact (SAC) fail during forming a plurality of contact holes formed by using a SAC etching process and a defect generation during performing a plug isolation process. The present invention prevents a Pinocchio defect that is a fundamental problem caused by the chemical mechanical polishing (CMP) process and simplifies a subsequent cleaning process performed according to the particles. Accordingly, it is possible to develop products with a high quality and a high speed and to replace the CMP process having a high unit process cost with an etch back process, thereby providing an effect of increasing a price competitiveness.

REFERENCES:
patent: 6337275 (2002-01-01), Cho et al.
patent: 6403459 (2002-06-01), Ohashi et al.
patent: 6458680 (2002-10-01), Chung et al.
patent: 6518157 (2003-02-01), Nam et al.
patent: 6689697 (2004-02-01), Jiang et al.

Affiliated with

Also associated with

Rating

Method for forming contact plug of semiconductor device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for forming contact plug of semiconductor device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for forming contact plug of semiconductor device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3932007