Methods and apparatus for using substrate carrier movement...

Details Methods and apparatus for using substrate carrier movement... Methods and apparatus for using substrate carrier movement...

2007-08-21

2007-08-21

Mackey, Patrick (Department: 3652)

Material or article handling

Apparatus for moving material between zones having different...

C414S411000, C414S939000

Reexamination Certificate

active

10650312

ABSTRACT:
A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate transfer location has a support adapted to support a substrate carrier. The substrate transfer location also has an actuator mechanism. The actuator mechanism is positioned relative to the support so as to interact with the opening mechanism of the substrate carrier. The actuator mechanism of the substrate transfer location and the opening mechanism of the substrate carrier are adapted to interface with each other at the substrate transfer location so as to employ movement of the substrate carrier to achieve opening and closing of the substrate carrier.

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