Reflective spatial light modulator

Details Reflective spatial light modulator Reflective spatial light modulator

2007-10-09

2007-10-09

Mack, Ricky (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S872000, C359S223100

Reexamination Certificate

active

11147420

ABSTRACT:
A micro-mirror array that is useful, for example, in a reflective spatial light modulator. In one embodiment, the micro mirror array includes spacer support walls, a vertical torsion hinge, and a mirror plate, all being fabricated from a single wafer. The micro-mirror array has a large fill ratio.

REFERENCES:
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patent: 6914871 (2005-07-01), Hara et al.
patent: 2002/0033982 (2002-03-01), Dewenter
patent: 2004/0145822 (2004-07-01), Pan et al.
patent: 2004/0240033 (2004-12-01), Pan et al.

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