Gate valve apparatus for vacuum processing system

Valves and valve actuation – With means to increase head and seat contact pressure – With positive reduction

Reexamination Certificate

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Details

C251S192000, C251S203000

Reexamination Certificate

active

11399445

ABSTRACT:
A gate valve apparatus includes a valve body to open and close a target object transfer port in a vacuum processing system. The valve body is reciprocated in a first direction relative to the transfer port. A support rod is connected to the valve body and extends in the first direction. A driving mechanism is configured to drive the valve body through the support rod. The driving mechanism includes a movable shaft structure reciprocated in a second direction perpendicular to the first direction. A first cam structure coupling the movable shaft structure to the support rod includes a portion that converts reciprocation movement of the movable shaft structure in the second direction into reciprocation movement of the support rod in the first direction. A swing drive is configured to swing the support rod and valve body about the central axis of the movable shaft structure.

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patent: WO 02/05322 (2002-01-01), None

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