Inspecting apparatus for semiconductor device

Details Inspecting apparatus for semiconductor device Inspecting apparatus for semiconductor device

2007-02-13

2007-02-13

Nguyen, Ha Tran (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

10823546

ABSTRACT:
An inspecting apparatus for semiconductor devices including: a match plate; a contact module combined with the match plate, and the match plate including a radiation unit radiating heat from the semiconductor devices to the outside, and a test unit contacting leads of the semiconductor; an insert module installed on a bottom of the contact module, and having a semiconductor device accommodator to accommodate the semiconductor device; and an auxiliary radiation member installed on a bottom of the insert module, and radiating the heat from the semiconductor device to the outside. Accordingly, the inspecting apparatus for semiconductor device according to the present invention performs testing at a constant temperature regardless of heat from the semiconductors by radiating the heat from the semiconductors immediately and efficiently, thereby producing more accurate test results. Accurate testing improves productivity and saves expense by removing faulty test results caused by identifying a qualified semiconductor as a defective semiconductor due to heat radiated from the semiconductor device.

REFERENCES:
patent: 5929651 (1999-07-01), Leas et al.
patent: 6049217 (2000-04-01), Viswanath et al.
patent: 6111421 (2000-08-01), Takahashi et al.
patent: 6720784 (2004-04-01), Martter et al.
patent: 2003-14812 (2003-01-01), None
patent: 1999-88521 (1999-12-01), None
patent: 2003-6195 (2003-01-01), None
KIPO Office Action, Mar. 31, 2005.
Korean Utility Model #20-0157983.

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