Electric heating – Metal heating – By arc
Reexamination Certificate
2007-06-12
2007-06-12
Van, Quang (Department: 3742)
Electric heating
Metal heating
By arc
C156S345440, C315S111210
Reexamination Certificate
active
10927587
ABSTRACT:
Disclosed herein is a plasma processing apparatus that introduces a process gas into an airtight processing container, that applies a radio frequency power to generate plasma, and that conducts a plasma process to an object to be processed arranged in the processing container. The plasma processing apparatus includes: an electrode unit arranged in the processing container, the electrode unit having an electrode for applying the radio frequency power, and a space portion arranged in the electrode unit, the space portion insulating the electrode and the processing container from each other. The space portion communicates with atmospheric air outside the processing container.
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Hayashi Daisuke
Himori Shinji
Matsuura Atsushi
Nagaseki Kazuya
Nonaka Ryo
Smith , Gambrell & Russell, LLP
Tokyo Electron Limited
Van Quang
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