Optical system for ultraviolet light

Details Optical system for ultraviolet light Optical system for ultraviolet light

2007-08-14

2007-08-14

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Having significant infrared or ultraviolet property

C359S351000, C359S355000, C359S358000, C359S665000

Reexamination Certificate

active

11252598

ABSTRACT:
An optical system for ultraviolet light having wavelengths λ≦200 nm, which may be designed in particular as a catadioptric projection objective for microlithography, has a plurality of optical elements including optical elements made of synthetic quartz glass or a fluoride crystal material transparent to a wavelength λ≦200 nm. At least two of the optical elements are utilized for forming at least one liquid lens group including a first delimiting optical element, a second delimiting optical element, and a liquid lens, which is arranged in an interspace between the first delimiting optical element and the second delimiting optical element and contains a liquid transparent to ultraviolet light having wavelengths λ≦200 nm. This enables effective correction of chromatic aberrations even in the case of systems that are difficult to correct chromatically.

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U.S. Appl. No. 60/632,550, filed Dec. 1, 2004, Weippert et al.

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