Methods of and apparatus for electrochemically fabricating...

Details Methods of and apparatus for electrochemically fabricating... Methods of and apparatus for electrochemically fabricating...

Filed on

2007-08-07

Date issued

2007-08-07

Examiner

Wong, Edna (Department: 1753)

Patent Class

Coating processes

SubClass

Nonuniform coating

SubSubClass

Applying superposed diverse coatings or coating a coated base

Other Related Categories

C427S258000, C427S265000, C427S270000, C427S271000, C427S272000, C427S282000, C427S402000, C205S118000, C205S135000, C205S170000, C205S181000, C205S182000, C205S220000, C205S221000, C205S223000

Type

Reexamination Certificate

Status

active

Patent number

10434519

Description

ABSTRACT:
Multi-layer structures are electrochemically fabricated by depositing a first material, selectively etching the first material (e.g. via a mask), depositing a second material to fill in the voids created by the etching, and then planarizing the depositions so as to bound the layer being created and thereafter adding additional layers to previously formed layers. The first and second depositions may be of the blanket or selective type. The repetition of the formation process for forming successive layers may be repeated with or without variations (e.g. variations in: patterns; numbers or existence of or parameters associated with depositions, etchings, and or planarization operations; the order of operations, or the materials deposited). Other embodiments form multi-layer structures using operations that interlace material deposited in association with some layers with material deposited in association with other layers.

REFERENCES:
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patent: 5190637 (1993-03-01), Guckel
patent: 6027630 (2000-02-01), Cohen
patent: 6197181 (2001-03-01), Chen
patent: 6235624 (2001-05-01), Sasaki et al.
patent: 6562656 (2003-05-01), Ho
patent: 2002/0185311 (2002-12-01), Cohn
patent: 2005/0079666 (2005-04-01), French et al.
Harshbarger, “The Desk . . . ”, http://www.ericharshbarger.org/lego/desk (Aug. 25, 2000).

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