Optically coupled sealed-cavity resonator and process

Details Optically coupled sealed-cavity resonator and process Optically coupled sealed-cavity resonator and process

2007-02-13

2007-02-13

Mulpuri, Savitri (Department: 2812)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Physical stress responsive

C438S057000, C257SE31001

Reexamination Certificate

active

10905036

ABSTRACT:
A process to form a laterally offset photodiode for an optically coupled resonator includes implanting a semiconductor substrate to form the laterally offset photodiode adjacent to the resonator. The resonator masks the implanting underneath the resonator when the semiconductor substrate is implanted. Also disclosed is an optically coupled resonator, a process for fabricating an optically coupled resonator, and a device including an optically coupled resonator having a laterally offset photodiode.

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