Process for fabrication of a ferrocapacitor

Details Process for fabrication of a ferrocapacitor Process for fabrication of a ferrocapacitor

2007-02-27

2007-02-27

Kebede, Brook (Department: 2823)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C257S295000, C438S048000, C438S785000

Reexamination Certificate

active

10673053

ABSTRACT:
A process for fabricating a ferrocapacitor comprises etching a layer of amorphous PZT formed over a layer having a low concentration of nucleation centres for PZT crystallisatlon. The etching step forms individual PZT elements. The side surfaces of the PZT elements are then coated with a layer of a material which promotes crystallisation of the PZT, such as one having a high concentration of PZT crystallisation centres (e.g. TiO2), and a PZT annealing step is carried out. The result is that the PZT has a high degree of crystallisation, with grain boundaries extending substantially horizontally through the PZT elements.

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