Scanning electron microscope and a method for evaluating...

Details Scanning electron microscope and a method for evaluating... Scanning electron microscope and a method for evaluating...

2007-01-16

2007-01-16

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron microscope type

C250S310000, C250S306000

Reexamination Certificate

active

10988522

ABSTRACT:
The present invention relates to a CDSEM (scanning electron microscope) capable of evaluating and presenting the measurement repeatability as a tool with a high degree of accuracy without being influenced by fluctuations in micro-minute shape that tend to increase with the microminiaturization of semiconductor patterns, and to a method for evaluating accuracy of repeated measurement using the scanning electron microscope. There is provided a function whereby when measuring a plurality of times the same part to be measured, by making use of a micro-minute pattern shape such as the roughness included in the pattern, pattern matching with a roughness template image is performed to correct two-dimensional deviation in position of the part to be measured on an enlarged measurement image acquired, and then an enlarged measurement area image is extracted and acquired. This makes it possible to eliminate variation in measurements caused by the micro-minute pattern shape.

REFERENCES:
patent: 5887080 (1999-03-01), Tsubusaki et al.
patent: 6111981 (2000-08-01), Tsubusaki et al.
patent: 6774364 (2004-08-01), Takagi
patent: 11-316115 (1999-11-01), None

Affiliated with

Also associated with

Rating

Scanning electron microscope and a method for evaluating... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Scanning electron microscope and a method for evaluating..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Scanning electron microscope and a method for evaluating... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3821225