Semiconductor nanowire fluid sensor and method for...

Details Semiconductor nanowire fluid sensor and method for... Semiconductor nanowire fluid sensor and method for...

2007-06-26

2007-06-26

Lee, Hsien-Ming (Department: 2823)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

To form ohmic contact to semiconductive material

C438S666000, C257S022000, C977S700000, C977S720000, C977S731000

Reexamination Certificate

active

11022123

ABSTRACT:
Nanowire fluid sensors are provided. The fluid sensors comprise a first electrode, a second electrode, and at least one nanowire between the first electrode and the second electrode. Each nanowire is connected at a first end to the first electrode and at a second end to the second electrode. Methods of fabricating and operating the fluid sensor are also provided.

REFERENCES:
patent: 2004/0079278 (2004-04-01), Kamins et al.
patent: 2004/0082178 (2004-04-01), Kamins et al.
patent: 2005/0133476 (2005-06-01), Islam et al.
patent: 2005/0212531 (2005-09-01), Wei

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