Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2007-05-15
2007-05-15
Huynh, Andy (Department: 2818)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S315000, C257S314000, C257S324000, C257SE21679
Reexamination Certificate
active
10876560
ABSTRACT:
A semiconductor storage device showing a good memory characteristic, and a manufacturing method thereof, includes a semiconductor layer, a stacked body including a first insulating layer, a charge trapping layer, and a second insulating layer that are provided above the semiconductor layer, a gate electrode provided above the stacked body, a side wall insulating layer provided at the side of the gate electrode, and impurity regions and provided in the semiconductor layer. The end surface of the stacked body is positioned outside the end surface of the gate electrode.
REFERENCES:
patent: 5838041 (1998-11-01), Sakagami et al.
patent: 2003/0227047 (2003-12-01), Hsu et al.
Huynh Andy
Nguyen Thinh T
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