Method of forming thin film pattern, method of manufacturing...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material

Reexamination Certificate

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C438S030000, C438S099000

Reexamination Certificate

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10803027

ABSTRACT:
A method of forming a thin film pattern by placing a functional liquid on a substrate, includes a bank formation step of forming banks in accordance with the thin film pattern on the substrate, a residue processing step of removing residue between the banks, and a material placement step of placing the functional liquid between the banks removed the residue.

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patent: 0 989 778 (2000-03-01), None
patent: 2001-0012686 (2001-02-01), None

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