Method of manufacturing a TFT array panel for a LCD

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device

Reexamination Certificate

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C430S313000, C430S317000, C430S319000, C430S321000, C438S030000

Reexamination Certificate

active

10673326

ABSTRACT:
A method of manufacturing a TFT array panel for a LCD disclosers that the gate electrode wiring, transparent conducting electrode, and the first electrode of the storage capacity are formed while the first mask is processing. Then, the selective deposition method is used to process the growth of the first metal wiring. This, therefore, can reduce the numbers of the mask processes. Further, the metal deposition with photo-resist lift-off step is used to implement the layout of the second metal wiring for the consequent transmission lines in the manufacturing process. Finally, the process of the passivation layer deposition is used to implement associated circuits of a TFT array panel for a LCD. The TFT array panel for a LCD for manufacturing circuits can simplify the manufacturing process and reduce the cost.

REFERENCES:
patent: 5663575 (1997-09-01), Yamamura et al.
patent: 6822702 (2004-11-01), Chapman et al.
patent: 2002/0093600 (2002-07-01), Chol

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