Method and apparatus for reducing substrate bias voltage drop

Details Method and apparatus for reducing substrate bias voltage drop Method and apparatus for reducing substrate bias voltage drop

2007-03-13

2007-03-13

Pert, Evan (Department: 2826)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Reexamination Certificate

active

09998165

ABSTRACT:
A semiconductor device is provided with a conductive layer provided on a backside of a semiconductor substrate. The conductive layer helps maintain a uniform bias voltage over the substrate. The conductive layer can also be used to apply a bias voltage to the substrate and reduce the number of bias voltage distribution regions required.

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