Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate
2007-04-17
2007-04-17
Rosasco, S. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
Reexamination Certificate
active
11314019
ABSTRACT:
An isolated light-shielding pattern formed from a light-shielding film region101and a phase shift region102is formed on a transparent substrate100serving as a mask. The phase shift region102has a phase difference with respect to a light-transmitting region of the transparent substrate100. Moreover, the width of the phase shift region102is set such that a light-shielding property of the phase shift region102becomes at least about the same as that of a light-shielding film having the same width.
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Matsushita Electric - Industrial Co., Ltd.
McDermott Will & Emery LLP
Rosasco S.
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