Stable metal structure with tungsten plug

Details Stable metal structure with tungsten plug Stable metal structure with tungsten plug

2007-05-29

2007-05-29

Pert, Evan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified configuration

C257S758000, C257SE23011, C438S672000

Reexamination Certificate

active

10919875

ABSTRACT:
In the preferred embodiment, a thick regular-k dielectric is formed on a substrate. A tungsten plug is formed in the thick regular-k dielectric. The thick regular-k dielectric is recessed and a thin low-k dielectric is formed on the thick regular-k dielectric. The thin low-k dielectric acts as a glue layer and as an etch stop layer. A thick low-k dielectric is formed on the thin low-k material. Optionally, an opening is formed through the thick low-k dielectric to expose the tungsten plug. The opening is then filled with copper or copper alloys.

REFERENCES:
patent: 5726499 (1998-03-01), Irinoda
patent: 6548901 (2003-04-01), Cote et al.
patent: 6593653 (2003-07-01), Sundararajan et al.
patent: 6677679 (2004-01-01), You et al.
patent: 6713874 (2004-03-01), Hopper et al.
patent: 6815329 (2004-11-01), Babich et al.
patent: 6841844 (2005-01-01), Hsu et al.
patent: 6917108 (2005-07-01), Fitzsimmons et al.
Chapter 4: Capacitance Model, BSIM3v3 Manual, UC Berkeley, 1995, http://bentgroup.stanford.edu/files/Flory—web.pdf.

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