Composite retaining ring

Details Composite retaining ring Composite retaining ring

2007-03-06

2007-03-06

Morgan, Eileen P. (Department: 3723)

Abrading

Machine

Rotary tool

C451S287000, C451S290000, C451S398000

Reexamination Certificate

active

11407695

ABSTRACT:
A two part retaining ring is described that has a lower ring and an upper ring. The lower ring contacts a polishing surface during chemical mechanical polishing. The upper surface and the lower surface of the lower ring have matching grooves formed therein to increase the flexibility of the lower ring.

REFERENCES:
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patent: 6835125 (2004-12-01), Tseng et al.
patent: 6974371 (2005-12-01), Chen et al.
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patent: 2002/0164939 (2002-11-01), Kuo et al.
patent: 2005/0113002 (2005-05-01), Chen et al.
patent: 2005/0211377 (2005-09-01), Chen et al.
patent: 2005/0215182 (2005-09-01), Fuhriman et al.
patent: 2005/0266783 (2005-12-01), Taylor

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