Dimensions for a MEMS scanning mirror with ribs and tapered...

Details Dimensions for a MEMS scanning mirror with ribs and tapered... Dimensions for a MEMS scanning mirror with ribs and tapered...

2007-03-06

2007-03-06

Tamai, Karl (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Charge accumulating

C359S224200, C359S225100, C359S291000

Reexamination Certificate

active

10828946

ABSTRACT:
A micro-electro-mechanical system (MEMS) mirror device includes an mirror, bonding pads, springs, and beams connected to the mirror. The mirror has a width greater than 1000 and less than 1200 microns, a length greater than 4000 and less than 5500 microns, and a thickness greater than 240 microns. Each beam includes a plurality of rotational comb teeth and is connected by multiple springs to the bonding pads.

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Great Britain Search Report, 3 pages, Aug. 2005.
French Search Report, 3 pages, Jan. 2006.

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