Automatic N2 purge system for 300 mm full automation fab

Details Automatic N2 purge system for 300 mm full automation fab Automatic N2 purge system for 300 mm full automation fab

2007-04-10

2007-04-10

Von Buhr, Maria N. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S112000

Reexamination Certificate

active

10821156

ABSTRACT:
A system for manufacturing semiconductor integrated circuit (IC) devices, including an operating control system, a process intermediate station in communication with the operating control system, and a gas purge device, wherein the gas purge device is included in the process intermediate station.

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