Optical arrangement and projection exposure system for...

Details Optical arrangement and projection exposure system for... Optical arrangement and projection exposure system for...

2007-09-25

2007-09-25

LeRoux, Etienne P. (Department: 2161)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

Reexamination Certificate

active

09934817

ABSTRACT:
An optical arrangement with a light source includes an optical element that is fastened in a mount. The light source emits radiation and the optical element is acted on thereby such that the heat that results lacks symmetry corresponding to the shape of the optical element. A connecting structure is provided between the optical element and the mount and has a symmetry that does not correspond to the shape of the optical element and effects an at least partial homogenization of the temperature distribution in the optical element.

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