Semiconductor device having plural electroconductive plugs

Details Semiconductor device having plural electroconductive plugs Semiconductor device having plural electroconductive plugs

2007-07-03

2007-07-03

Owens, Douglas W. (Department: 2821)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S296000, C257S758000

Reexamination Certificate

active

10920176

ABSTRACT:
The short circuit between the bit line and thee cell contact can be prevented without considerably increasing the number of the manufacturing processes. The bit line6electrically coupled to the cell contact9is formed of the material, which is same as the material of cell contact9. In the process for forming the bit line6on the cell contact interlayer film8by etching, the etching for creating an upper surface of the cell contact9that is not coupled to the bit line6being lower than an upper surface of the cell contact9that is coupled to the bit line6. Further, after the formation of the bit line6, the barrier metal layer5formed on the lower surface of the bit line6is selectively etched.

REFERENCES:
patent: 5204286 (1993-04-01), Doan
patent: 5895947 (1999-04-01), Lee et al.
patent: 2001-257325 (2001-09-01), None

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