Modulated scatterometry

Details Modulated scatterometry Modulated scatterometry

2007-07-03

2007-07-03

Stafira, Michael P. (Department: 2877)

Optics: measuring and testing

By polarized light examination

Of surface reflection

Reexamination Certificate

active

11088538

ABSTRACT:
An apparatus for scatterometry measurements is disclosed. The apparatus includes a modulated pump source for exciting the sample. A separate probe beam is directed to interact with the sample and the modulated optical response is measured. The measured data is subjected to a scatterometry analysis in order to evaluate geometrical sample features that induce light scattering.

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