Tunable gas distribution plate assembly

Details Tunable gas distribution plate assembly Tunable gas distribution plate assembly

2007-09-18

2007-09-18

Zervigon, Rudy (Department: 1763)

Coating apparatus

Gas or vapor deposition

C118S7230ER, C156S345330, C156S345340, C156S345430, C156S345440

Reexamination Certificate

active

10337483

ABSTRACT:
A gas distribution plate assembly and a method for distributing gas in a processing chamber are provided. In one embodiment, a gas distribution plate assembly includes a tuning plate coupled to a diffuser plate. The tuning plate has a plurality of orifice holes formed therethrough that align with a plurality of apertures formed through the diffuser plate, where the apertures each have a greater sectional area than the holes in the tuning plate. Each aperture is aligned with a respective hole to define gas passages through the gas distribution plate assembly. The tuning plate may be interchanged with a replacement tuning plate to change the gas flow characteristics through the gas distribution plate assembly.

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