Semiconductor processing device, semiconductor processing...

Details Semiconductor processing device, semiconductor processing... Semiconductor processing device, semiconductor processing...

2007-01-09

2007-01-09

Wu, Jingge (Department: 2624)

Image analysis

Applications

Manufacturing or product inspection

C348S086000, C348S125000, C356S237100, C438S016000

Reexamination Certificate

active

10328937

ABSTRACT:
A semiconductor processing device includes a processing section to process a semiconductor substrate in accordance with job information which is used to process the semiconductor substrate. An imaging section takes an image of a processed portion of the semiconductor substrate for each time of processing by the processing section. An image-processing section converts any one and another of the images to image data which are different from each other in data volume, and associates a result of processing from the processing section, the job information and the image data with each other in each processing. An input/output section outputs at least the result of processing and the image data.

REFERENCES:
patent: 4758782 (1988-07-01), Kobayashi
patent: 4977328 (1990-12-01), Van Vucht
patent: 6175417 (2001-01-01), Do et al.
patent: 10-143660 (1996-05-01), None
patent: 11-223662 (1999-08-01), None
patent: 2000-077290 (2000-03-01), None

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