Direct relative motion measurement for vibration induced...

Details Direct relative motion measurement for vibration induced... Direct relative motion measurement for vibration induced...

2007-07-24

2007-07-24

Williams, Hezron (Department: 2856)

Data processing: measuring, calibrating, or testing

Measurement system

Measured signal processing

C073S001820, C073S105000, C073S649000, C702S097000, C702S190000, C702S191000

Reexamination Certificate

active

10929260

ABSTRACT:
A surface analysis apparatus and a method for compensating for mechanical vibrations and drifts in a surface analysis instrument are disclosed. A probe that is sensitive to the distance between the probe and a sample surface provides a probe signal. The probe signal contains information about the surface properties and noise due to changes in the probe-surface distance. A sensor measures a displacement between a probe and the sample surface. The sensor is substantially insensitive to the surface properties measured by the probe. The displacement measurement can be used to compensate for the noise in the probe signal.

REFERENCES:
patent: 5610846 (1997-03-01), Trapet et al.
patent: 6308557 (2001-10-01), Heiland
patent: 6510363 (2003-01-01), Hidaka et al.
patent: 7055367 (2006-06-01), Hajdukiewicz et al.
patent: WO 200204883 (2002-01-01), None

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