System for substrate processing with meniscus, vacuum, IPA...

Details System for substrate processing with meniscus, vacuum, IPA... System for substrate processing with meniscus, vacuum, IPA...

2007-07-10

2007-07-10

Perrin, Joseph L. (Department: 1746)

Cleaning and liquid contact with solids

Apparatus

With plural means for supplying or applying different fluids...

C134S099100, C134S902000, C034S407000

Reexamination Certificate

active

10330897

ABSTRACT:
One of many embodiments of a substrate preparation system is provided which includes a drying system, the drying system including at least one proximity head for drying a substrate. The system also includes a cleaning system for cleaning the substrate.

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