Method and system for controlling the chemical mechanical...

Details Method and system for controlling the chemical mechanical... Method and system for controlling the chemical mechanical...

2006-12-19

2006-12-19

Rachuba, M. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

With indicating

C451S011000, C451S056000, C451S285000, C451S443000

Reexamination Certificate

active

07150675

ABSTRACT:
In a system and a method according to the present invention, a sensor signal, such as a motor current signal, from a drive assembly of a pad conditioning system is used to estimate the status of one or more consumables in a CMP system.

REFERENCES:
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patent: 6306008 (2001-10-01), Moore
patent: 6336842 (2002-01-01), Ootsuki et al.
patent: 6494765 (2002-12-01), Gitis et al.
patent: 6905571 (2005-06-01), Sakuma et al.
patent: 2003/0013394 (2003-01-01), Choi et al.
patent: 2004/0089070 (2004-05-01), Elledge
patent: WO 01/58644 (2001-08-01), None
patent: WO 02/38336 (2002-05-01), None

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