MOS transistor having a work-function-dominating layer

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S314000, C257S315000, C257SE31063

Reexamination Certificate

active

07145208

ABSTRACT:
A MOS transistor including a substrate, a gate dielectric layer on the substrate, a stacked gate on the gate dielectric layer, and a source/drain in the substrate beside the stacked gate is provided. In particular, the stacked gate includes, from bottom to top, a first barrier layer, an interlayer, a work-function-dominating layer, a second barrier layer and a poly-Si layer, wherein the work-function-dominating layer includes a metallic material.

REFERENCES:
patent: 6696345 (2004-02-01), Chau et al.
patent: 6754108 (2004-06-01), Forbes
patent: 2004/0178458 (2004-09-01), Eppich et al.
patent: 2005/0023602 (2005-02-01), Forbes et al.
Michaelson, “The work function of the elements and its periodicity”,Journal of Applied Physics, vol. 48, No. 11, Nov. 1977, pp. 4729-4733.
Zlatanovic et al., “Variation of reflectivity spectra, preferred orientation and stoichiometry of polycrystalline TiN films due to nitrogen flow variation”Proc. 22nd International Conference on Microelectronics(MIEL 2000), vol. 1, NIS, SERBIA, May 14-17, 2000, pp. 261-264.
Farahani et al. , “Limitation of the Tin/ Ti layer formed by the rapid thermal heat treatment of pure Ti films in an NH3ambient in fabrication of submicrometer CMOS flash EPROM IC's”,IEEE Transactions on Semiconductor Manufacturing, vol. 10, No. 1, Feb. 1997, pp. 147-153.
Abe et al. “Cu damascene interconnects with crystallographic texture control and its electromigration performance”,IEEE 98CH36173. 36thAnnual International Reliability Physics Symposiums, Reno, Nevada, 1998, pp. 342-347.
Sun et al. “A comparative study of CVD TiN and CVD TaN diffusion barriers for copper interconnection”, 1995, pp. 18.5.1-18.5.4.

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