Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2006-12-05
2006-12-05
Luu, Chuong Anh (Department: 2818)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S250000, C438S256000, C438S399000
Reexamination Certificate
active
07144798
ABSTRACT:
An integrated circuit device having a semiconductor substrate includes a gate structure on the semiconductor substrate. Source/drain regions are on opposite sides of the gate structure. A contact pad is on at least one of the source/drain region, and a silicide cap is on a surface of the contact pad opposite the respective source/drain region.
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Notice of Office Action, Korean Application No. 10-2002-0046573, May 28, 2004.
Jang Se-Myeong
Jin Gyo-young
Oh Yong-chul
Luu Chuong Anh
Myers Bigel & Sibley & Sajovec
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