Transport apparatus

Details Transport apparatus Transport apparatus

2006-02-07

2006-02-07

Whitehead, Jr., Carl (Department: 2813)

Material or article handling

Apparatus for moving material between zones having different...

C355S030000, C355S075000, C430S005000

Reexamination Certificate

active

06994507

ABSTRACT:
In transporting a reticle with a pellicle, gas purge is efficiently performed in a pellicle space or the environment in the pellicle space is efficiently maintained. Injectors are provided in a pair of fork positions or a reticle hand. Inert gas is injected and supplied from the injectors into a pellicle space through vent holes of a reticle with a pellicle. In this state, the reticle with the pellicle is transported.

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S. Wolf and R.N. Tauber, Silicon Processing for the VLSI Era, vol. 1, 2ndedition, Lattice Press, 2000, p. 527.

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