Coating apparatus – Control means responsive to a randomly occurring sensed... – Responsive to condition of coating material
Reexamination Certificate
2006-08-08
2006-08-08
Koch, George (Department: 1734)
Coating apparatus
Control means responsive to a randomly occurring sensed...
Responsive to condition of coating material
C118S691000, C118S692000, C118S689000, C118S058000, C118S320000, C118S323000
Reexamination Certificate
active
07087118
ABSTRACT:
A coating film forming apparatus for forming a film by applying a coating solution to a substrate, which is provided with a cassette section, coating unit, developing unit, pre-treatment/post-treatment units and a main arm for transferring the substrate between the respective units. In the coating unit, provided is a coating section in which a resist is applied on the substrate in a manner of single stroke by intermittently moving the substrate in a Y-direction and by moving a nozzle in an X-direction, and provided is a reduced-pressure drying section for drying under reduced pressure the substrate after being applied, and further provided is equipment for removing the coating film adhered to a periphery of the substrate. Additionally, when the reduced-pressure drying section is arranged outside the coating unit, the main arm is covered with a cover so that the inside thereof is under a solvent atmosphere.
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Translation of JP09-320915.
Akimoto Masami
Esaki Yukihiko
Ishizaka Nobukazu
Kitano Takahiro
Koga Norihisa
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
Tokyo Electron Limited
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