Radiant energy – Irradiation of objects or material
Reexamination Certificate
2006-08-01
2006-08-01
Wells, Nikita (Department: 2881)
Radiant energy
Irradiation of objects or material
C250S492220, C250S492230, C250S492300, C250S398000
Reexamination Certificate
active
07084411
ABSTRACT:
In a pattern-definition device (102) for use in a particle-beam exposure apparatus, a beam of electrically charged particles is patterned through a plurality of apertures. The device comprises at least one deflector array means having a plurality of openings surrounding the beamlets, wherein for each opening are provided at least two deflecting electrodes to which different electrostatic potentials are appliable, thus correcting the path of the beamlet(s) passing through the respective opening according to a desired path through the device (102). According to a partition of the plurality of apertures into a set of subfields (Aij), the deflecting electrodes belonging to the same subfield (Aij) have common electric supplies. Thus, the electrostatic potentials of the deflecting electrodes belonging to the same subfield (Aij) are constant or linearly interpolated between basic potentials fed at basic points (Pij) of the respective subfield.
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Chalupka Alfred
Lammer Gertraud
Lammer-Pachlinger Wolfgang
Hashmi Zia R.
IMS Nanofabrication GmbH
RatnerPrestia
Wells Nikita
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