Method and apparatus for improved beam stability in high...

Details Method and apparatus for improved beam stability in high... Method and apparatus for improved beam stability in high...

2006-06-13

2006-06-13

Nguyen, Kiet T. (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C250S424000

Reexamination Certificate

active

07060988

ABSTRACT:
Apparatus and methods for improving beam stability in high current gas-cluster ion beam systems by reducing the frequency of transients occurring in the vicinity of the ionizer through use of shielding conductors and distinct component electrical biasing to inhibit backward extraction of ions from the ionizer towards the gas-jet generator.

REFERENCES:
patent: 5814194 (1998-09-01), Deguchi et al.
patent: 6331227 (2001-12-01), Dykstra et al.
patent: 6416820 (2002-07-01), Yamada et al.
patent: 6629508 (2003-10-01), Dykstra
patent: 6646277 (2003-11-01), Mack et al.
patent: 2004/0113093 (2004-06-01), Mack

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