Termination of secondary frequencies in RF power delivery

Details Termination of secondary frequencies in RF power delivery Termination of secondary frequencies in RF power delivery

2006-05-23

2006-05-23

Philogene, Haissa (Department: 2828)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

C315S111510, C324S652000, C324S637000, C204S298080

Reexamination Certificate

active

07049751

ABSTRACT:
There is provided a secondary reactive termination circuit connected between the output of the RF power generator and the input of the plasma chamber to allow the tight regulation or limiting of the voltage and current components of the secondary frequencies within the process plasma. The secondary reactive circuit controls the impedance of the match network designed primarily to operate at the fundamental frequency of the RF power generator as seen by secondary frequencies in the system. Power delivery components are measured at the connection point of the termination circuit and used as feedback signals to control variable values of the termination circuit components.

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