Metal-gate electrode for CMOS transistor applications

Details Metal-gate electrode for CMOS transistor applications Metal-gate electrode for CMOS transistor applications

2006-02-14

2006-02-14

Mai, Anh Duy (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S388000, C257S412000

Reexamination Certificate

active

06998686

ABSTRACT:
Described is a CMOS transistor structure with a multi-layered gate electrode structure and a method of fabrication. The gate electrode structure has a three-layered metallic gate electrode and a polysilicon layer. The first metallic layer acts as a barrier to prevent the second metallic layer from reacting with an underlying dielectric. The second metallic layer acts to set the work function of the gate electrode structure. The third metallic layer acts as a barrier to prevent the second metallic layer from reacting with the polysilicon layer.The method of fabricating the gate electrode structure includes forming the three metallic layers thick enough that each layer provides the barrier and work-function setting functions mentioned above, but also thin enough that a subsequent wet-etch can be performed without excessive undercutting of the metallic layers. During implant and anneal processes, the polysilicon layer acts as a protective mask over the metallic layers to protect an underlying silicon substrate from interacting with dopants used during the implant process.

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