Crystalline thin film and process for production thereof,...

Details Crystalline thin film and process for production thereof,... Crystalline thin film and process for production thereof,...

2006-10-03

2006-10-03

Coleman, W. David (Department: 2823)

Semiconductor device manufacturing: process

Formation of semiconductive active region on any substrate

Amorphous semiconductor

Reexamination Certificate

active

07115487

ABSTRACT:
A process for producing a crystalline thin film is provided which comprises melting and resolidifying a starting thin film having regions different in the state coexisting continuously. A small region of the starting thin film has a size distribution of number concentration of crystal grains or crystalline clusters different from that of the surrounding region. In the process of melting and resolidification, the crystal grain grows preferentially in the one region to control the location of the crystal grain in the crystalline thin film.

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