Abrading – Machine – Reciprocating tool
Reexamination Certificate
2006-08-08
2006-08-08
Rachuba, M. (Department: 3723)
Abrading
Machine
Reciprocating tool
C451S296000
Reexamination Certificate
active
07086936
ABSTRACT:
A linear chemical mechanical planarization (CMP) belt pad includes a first portion comprised of a first pad material, e.g., polyurethane, and a second portion comprised of a second pad material, e.g., porous rubber. The first portion has a first end and a second end. The second portion is situated between the first and second ends of the first portion and extends substantially across a width of the belt pad. Alternatively, the second portion may be embedded in the first portion such that a peripheral surface of the second portion is surrounded by a surface of the first portion. A linear CMP system and a method for planarizing a wafer in a single linear CMP module also are described.
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Lam Research Corporation
Martine & Penilla & Gencarella LLP
Rachuba M.
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