Process control system and process control method

Details Process control system and process control method Process control system and process control method

2006-05-16

2006-05-16

Cabrera, Zoila (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C702S182000

Reexamination Certificate

active

07047095

ABSTRACT:
A process control system that controls processing executed on semiconductor wafers by processing apparatuses120, 122, 124installed in each bay (area)110inside a factory the processing results of which are predictable, having installed in the corresponding bay, at least one measuring apparatus130that executes a measuring operation on workpieces undergoing the processing in the bay, a transfer path140of a transfer apparatus, through which the workpieces are transferred among various apparatuses installed within the bay including the individual processing apparatuses and the measuring apparatus and a process control device150that controls the processing apparatuses, the measuring apparatus and the transfer apparatus in the bay. This structure reduces the length of time (cycle time) to elapse from the processing through the inspection operation and also improves the operating rate of each processing apparatus.

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