Method and apparatus for determining the dielectric constant...

Details Method and apparatus for determining the dielectric constant... Method and apparatus for determining the dielectric constant...

2006-04-11

2006-04-11

Nguyen, Vinh (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S663000

Reexamination Certificate

active

07026837

ABSTRACT:
In an apparatus and method for determining a permittivity of a dielectric layer on a semiconductor wafer, a thickness of the dielectric layer is determined and a topside of the wafer is moved into contact with a spherical portion of an at least partially spherical and electrically conductive surface. An electrical stimulus is applied between the electrically conductive surface and the semiconducting material. A capacitance of a capacitor comprised of the electrically conductive surface, the semiconductor material and the dielectric layer is determined from the applied stimulus. A permittivity of the dielectric layer is then determined as a function of the capacitance and the thickness of the dielectric layer.

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