Substrate brush scrubbing and proximity cleaning-drying...

Details Substrate brush scrubbing and proximity cleaning-drying... Substrate brush scrubbing and proximity cleaning-drying...

2006-05-16

2006-05-16

Carrillo, Sharidan (Department: 1746)

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

C134S026000, C134S032000, C134S033000, C134S042000, C134S902000, C015S077000

Reexamination Certificate

active

07045018

ABSTRACT:
A method for cleaning and drying a front and a back surface of a substrate is provided. The method includes brush scrubbing the back surface of the substrate using a brush scrubbing fluid chemistry. The method further includes applying a front meniscus onto the front surface of the substrate upon completing the brush scrubbing of the back surface. The front meniscus includes a front cleaning chemistry that is chemically compatible with the brush scrubbing fluid chemistry.

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