Fishing – trapping – and vermin destroying
Patent
1989-05-19
1991-05-28
Hearn, Brian E.
Fishing, trapping, and vermin destroying
437189, 437192, 437193, 427125, 427252, H01L 2144, C23C 1600
Patent
active
050195310
ABSTRACT:
A process for growing a thin metallic film of gold or copper selectively on a predetermined area of a substrate. An organic complex or organometallic compound of gold or copper as a starting material is heated to evaporate the same, while a substrate having on the surface thereof a metal or a metallic silicide as a first material and an oxide or a nitride as a second material is heated at a temperature equal to or higher than the decomposition temperature, on the first material, of a vapor of the starting material. The vapor of the evaporated starting material is fed together with a reducing gas onto the heated substrate to selectively grow a thin metallic film of gold or copper only on the surface of the first material.
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S. Wolf et al., Silicon Processing for the VLSI Era, Lattice Press, Sunset Beach, (1986), pp. 169, 187-191.
Arita Yoshinobu
Awaya Nobuyoshi
Hearn Brian E.
Holtzman Laura M.
Nippon Telegraph and Telephone Corporation
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