Method of fabricating silicon integrated circuit on glass

Details Method of fabricating silicon integrated circuit on glass Method of fabricating silicon integrated circuit on glass

2006-07-04

2006-07-04

Fourson, George (Department: 2823)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

On insulating substrate or layer

C438S479000, C438S496000, C438S795000, C438S796000, C257SE21333, C257SE21475, C257SE21415

Reexamination Certificate

active

07071042

ABSTRACT:
A method of fabricating a silicon integrated circuit on a glass substrate includes preparing a glass substrate; fabricating a silicon layer on the glass substrate; implanting ions into the active areas of the silicon layer; covering the silicon layer with a heat pad material; activating the ions in the silicon layer by annealing while maintaining the glass substrate at a temperature below that of the thermal stability of the glass substrate; removing the heat pad material; and completing the silicon integrated circuit.

REFERENCES:
patent: 5771110 (1998-06-01), Hirano et al.
patent: 6140668 (2000-10-01), Mei et al.
patent: 6204535 (2001-03-01), Yamazaki et al.
patent: 6303411 (2001-10-01), Camm et al.
patent: 6337109 (2002-01-01), Yamazaki et al.
patent: 6620711 (2003-09-01), Yamazaki
patent: 2001/0025960 (2001-10-01), Ohtani et al.
patent: 2001/0034089 (2001-10-01), Yamazaki et al.
patent: 2001/0049163 (2001-12-01), Yamazaki et al.
patent: 2002/0127827 (2002-09-01), Yamazaki et al.
patent: 2002/0146868 (2002-10-01), Miyasaka
patent: 2004/0132293 (2004-07-01), Takayama et al.
patent: 2004/0147139 (2004-07-01), Jiang
Colace et al.,Efficient high-speed near-infrared Ge photodetectors integrated on Si substrates, Applied Physics Letters, vol. 76, No. 10, pp. 1231-1233 (2000).

Affiliated with

Also associated with

Rating

Method of fabricating silicon integrated circuit on glass does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of fabricating silicon integrated circuit on glass, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of fabricating silicon integrated circuit on glass will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3584990