Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate
2006-05-16
2006-05-16
Font, Frank G. (Department: 2881)
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
C250S306000, C250S310000, C250S397000, C250S492220, C250S492200, C250S492300, C250S428000
Reexamination Certificate
active
07045791
ABSTRACT:
The invention concerns a column for producing a focused particle beam comprising: a device (100) focusing particles including an output electrode (130) with an output hole (131) for allowing through a particle beam (A); an optical focusing device (200) for simultaneously focusing an optical beam (F) including an output aperture (230). The invention is characterized in that said output aperture (230) is transparent to the optical beam (F), while said output electrode (130) is formed by a metallic insert (130) maintained in said aperture (230) and bored with a central hole (131) forming said output orifice.
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Benas-Sayag Gérard
Bouchet Patrick
Corbin Antoine
Sudraud Pierre
Credence Systems Corporation
Dorsey & Whitney LLP
El-Shammaa Mary
Font Frank G.
Orsay-Physics, S.A.
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