Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2006-03-28
2006-03-28
Nelms, David (Department: 2818)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C257S072000, C117S009000
Reexamination Certificate
active
07018874
ABSTRACT:
A process for fabricating thin film transistors is disclosed, which comprises a two-step laser annealing process as follows:crystallizing the channel portion by irradiating the channel portion with an irradiation beam; andmodifying the electric properties of the source and the drain by irradiating the source and the drain with an irradiation beam in a step independent to the first step of crystallizing the channel portion.
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Lee Calvin
Nelms David
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
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