Load cup for chemical mechanical polishing

Details Load cup for chemical mechanical polishing Load cup for chemical mechanical polishing

2006-09-05

2006-09-05

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Precision device or process - or with condition responsive...

Computer controlled

C451S339000

Reexamination Certificate

active

07101253

ABSTRACT:
A load cup for transferring a substrate in a chemical mechanical polishing system is provided. In one embodiment, a load cup for transferring substrates in a chemical mechanical polishing system includes a substrate support having a first side adapted to support a substrate thereon and at least one actuator coupled to the substrate support and adapted to move the substrate support laterally. In another embodiment, a method for transferring a substrate between a polishing head and a load cup includes sensing a position of the polishing head relative to the load cup and automatically aligning the load cup and polishing head in response to the sensed relative position.

REFERENCES:
patent: 5329732 (1994-07-01), Karlsrud et al.
patent: 5738574 (1998-04-01), Tolles et al.
patent: 5762543 (1998-06-01), Kasprzyk et al.
patent: 5934984 (1999-08-01), Togawa et al.
patent: 5947802 (1999-09-01), Zhang et al.
patent: 6068544 (2000-05-01), Chiu et al.
patent: 6074275 (2000-06-01), Yashiki et al.
patent: 6102777 (2000-08-01), Duescher et al.
patent: 6131589 (2000-10-01), Vogtmann et al.
patent: 6196896 (2001-03-01), Sommer
patent: 6648730 (2003-11-01), Chokshi et al.
patent: 6716086 (2004-04-01), Tobin
patent: 2003/0003848 (2003-01-01), Tobin
patent: 0 347 718 (1989-12-01), None
patent: 1323350 (1987-07-01), None
patent: 99/1022 (1999-08-01), None

Affiliated with

Also associated with

Rating

Load cup for chemical mechanical polishing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Load cup for chemical mechanical polishing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Load cup for chemical mechanical polishing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3562622